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  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2005),
  • paper JWB17

SEM and SPM Studies of Single-Shot Damage on Silicon

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Abstract

Scanning probe microscopy was used to study femtosecond laser ablation of Silicon as a function of laser wavelength, doping concentration, and sample temperature to gain a greater understanding of the femtosecond laser damage mechanism.

© 2005 Optical Society of America

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