Fabrication of hyperboloid-drum structures for sub micro- to nano-meter sized emitters

Jun-Youn Kim; Sung-jae An; Jungyeon Kim; O’Dae Kwon

Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference
Technical Digest (Optica Publishing Group, 2003),
paper QThA4

Fabrication of hyperboloid-drum structures for sub micro- to nano-meter sized emitters

Jun-Youn Kim, Sung-jae An, Jungyeon Kim, and O’Dae Kwon

Quantum Electronics and Laser Science Conference 2003

Baltimore, Maryland United States
1–6 June 2003
ISBN: 1-55752-733-4

From the session
Nano-optics in II-VI Materials and Microcavities (QThA)

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J. Kim, S. An, J. Kim, and O. ’D. Kwon, "Fabrication of hyperboloid-drum structures for sub micro- to nano-meter sized emitters," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference, Technical Digest (Optica Publishing Group, 2003), paper QThA4.

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Abstract

We report characteristics of newly devised hyperboloid-drum structures to reduce the active layer diameter to sub micro-meter while maintaining the wide area for easy electrode connection. The active layer diameters, the etched-waist of ~ 8 µm–tall hyperboloid-drum, can be adjusted down to ~ 100 nm.

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