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  • Quantum Electronics and Laser Science Conference
  • OSA Technical Digest (Optica Publishing Group, 2002),
  • paper QMH6

Quantum Ellipsometry

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Abstract

Ellipsometry1–6 is a well-established metrological technique that is used, particularly in the semiconductor industry, to determine the thickness and optical constants of thin films.

© 2002 Optical Society of America

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