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Optica Publishing Group
  • Quantum Electronics and Laser Science Conference
  • OSA Technical Digest (Optica Publishing Group, 1992),
  • paper QTuI8

Semiclassical simulation of the atomic density in an optical standing wave; theoretical limits of narrowness of submicron direct-write optical lithography

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Abstract

Recent experiments in submicron optical lithography used a sodium atomic beam propagating in the z^ direction and cooled along the x^ direction to write a permanent, periodic, submicron grating in the x^ direction on a silicon substrate by lensing the atomic beam with an optical standing-wave field in the x^ direction.1 The width of the diffraction peaks have not yet been measured. In this paper, we show that a semiclassical force2 simulation without diffusion predicts a width of ≈100 Å, or 2% of λ, the wavelength of the optical standing-wave field (see Fig. 1).

© 1992 Optical Society of America

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