Despite many years of basic research and the fact that the microelectronic industry depends heavily on technology involving the chemistry between a metal and semiconductor, major mysteries still exist concerning the silicon-metal interaction. For example, it is not known what early steps led to alloy and metal silicide formation following metal desorption. on a silicon surface at low temperatures.1,2

© 1989 Optical Society of America

PDF Article


You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
Login to access OSA Member Subscription