Abstract
Despite many years of basic research and the fact that the microelectronic industry depends heavily on technology involving the chemistry between a metal and semiconductor, major mysteries still exist concerning the silicon-metal interaction. For example, it is not known what early steps led to alloy and metal silicide formation following metal desorption. on a silicon surface at low temperatures.1,2
© 1989 Optical Society of America
PDF ArticleMore Like This
T. G. TAYLOR, M. PESCHKE, K. F. WILLEY, P. Y. CHENG, and M. A. DUNCAN
THAA4 Quantum Electronics and Laser Science Conference (CLEO:FS) 1989
BEN S. FRIESER
THAA2 Quantum Electronics and Laser Science Conference (CLEO:FS) 1989
W. D. Reents, M. L. Mandich, and Vladimir E. Bondybey
JFC4 International Laser Science Conference (ILS) 1986