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Effect of FIB milling on MEMS structures

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Abstract

In this paper, first we presented fabrication process of SOI based fixed-fixed Si macro machined beams. We milled these beams at centre using Focused Ion Beam (FIB) to fabricate coupled cantilever waveguides. In order to analyse stress in micro structures, we studied the profile of beams for different milling depth. Results obtained by experimental and numerical methods match very well.

© 2014 Optical Society of America

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