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Mid-IR Evanescent Field Gas Sensor Based on Silicon-on-Nitride Slot Waveguide

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Abstract

We propose silicon-on-nitride slot waveguide-based evanescent field absorption sensing scheme for ammonia gas in the mid-IR wavelength. Detection down to 10 ppm is feasible with estimated evanescent field fraction (EFF) ~ 43%.

© 2014 Optical Society of America

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