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Realization of Rod-type Photonic Crystal Structure for Optical Sensing using Dip-Pen Nano-lithography

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Abstract

Following design optimization, a rod-type photonic crystal structure is realized using dip-pen nano-lithography. Dots are written by 16-MHA on metal-coated silicon substrate. After dry-etching, SEM images confirm the rod-diameter of ~250nm and lattice-constant of ~470nm.

© 2014 Optical Society of America

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