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Conferences > PhAST > 2007 > JMB > JMB5
  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • OSA Technical Digest (CD) (Optica Publishing Group, 2007),
  • paper JMB5

Three-Dimensional Photonic Crystals Fabricated by Double-Angled Plasma Etching

Shigeki Takahashi, Takeshi Nakamori, Makoto Okano, Masahiro Imada, and Susumu Noda

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Abstract

Three-dimensional photonic crystals with a depth of two lattice constants are successfully fabricated by a two-stage angled plasma etching method. The sample showed ~90% reflectance and ~10dB attenuation around the photonic bandgap wavelength region.

© 2007 Optical Society of America

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