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  • Frontiers in Optics 2007/Laser Science XXIII/Organic Materials and Devices for Displays and Energy Conversion
  • OSA Technical Digest (CD) (Optica Publishing Group, 2007),
  • paper JSuA5
  • https://doi.org/10.1364/FIO.2007.JSuA5

Optical fabrication of a micro-electron column and large area scanning application

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Abstract

Basic components of micro-electron column were assembled with optical alignment and laser bonding. Source and Einzel lenses were aligned with the diffraction method of laser beam and bonded simultaneously by laser welding. The optical fabrication of micro-column was performed within ±4% precision for the maximum aperture size. The fully assembled micro-column showed good scanning properties for a large area LCD testing.

© 2007 APS DLS

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