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Optical properties and mechanical loss of amorphous Ta2O5 thin films bombarded with low energy assist ions

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Abstract

Amorphous tantala (Ta2O5) thin films were deposited by reactive ion beam sputtering with simultaneous low energy assist Ar+ or Ar++O2+ bombardment. The films absorption and mechanical losses are not significantly affected by the ion bombardment.

© 2019 The Author(s)

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