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Conferences > OIC > 2016 > WC > WC.8

Monitoring the narrow-band pass filter deposition by calculating refractive index in real-time

Nai-Xiang Lin, Menh-Chi Li, Chiang-Cheng Han, and Cheng-Chung Lee

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Abstract

Optical monitoring plays an important role in film deposition. In this study, an optical monitoring method which can work out the refractive index of material in real-time improves the quality of narrow-band pass filter effectively.

© 2016 Optical Society of America

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