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Conferences > OIC > 2016 > WC > WC.5

Versatile Optical Monitoring System with both Broadband and Monochromatic Algorithms

Stephan Waldner and Jürgen Buchholz

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Abstract

A new optical monitoring system operating both in broadband and in monochromatic mode is presented. Measurement of transmission as well as reflection, directly on the substrate or on a test glass changer is possible. This system enables the user to continue to use well established monochromatic monitoring schemes and to exploit the advanced broadband monitoring capabilities including in-situ reoptimization.

© 2016 Optical Society of America

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