Optical Monitoring Techniques for Optical Thin Films

Bryan Barney

doi:10.1364/OIC.2016.WC.3

Optical Interference Coatings 2016
OSA Technical Digest (online) (Optica Publishing Group, 2016),
paper WC.3
•https://doi.org/10.1364/OIC.2016.WC.3

Optical Monitoring Techniques for Optical Thin Films

Bryan Barney

Optical Interference Coatings 2016

Tucson, Arizona United States
19–24 June 2016
ISBN: 978-1-943580-13-2

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OIC 2016 Manufacturing Problem Results and Process Monitoring (WC)

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B. Barney, "Optical Monitoring Techniques for Optical Thin Films," in Optical Interference Coatings 2016, OSA Technical Digest (online) (Optica Publishing Group, 2016), paper WC.3.

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Abstract

This paper will discuss the progress to date on broadband monitoring in light of the current state of technology expanding on how current methods of layer endpoints improve system performance and yields.

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