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Conferences > OIC > 2016 > WB > WB.6

Modeling and simulation of reactive magnetron co-sputtering for mixed oxide coatings

Neil R. Murphy, Lirong Sun, and John T. Grant

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Abstract

This work details the development and validation of a variant of the “Berg model for reactive sputtering” that is capable of predicting the chemical valence state of reactively co-sputtered Mo-Ge-O thin films.

© 2016 Optical Society of America

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