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Conferences > OIC > 2016 > WB > WB.3

Three-Dimensional Plasmon Resonance Device Fabricated by Auto-Cloning Deposition and Atomic Layer Deposition

Shih-Hao Chan, Chien-Cheng Kuo, Cheng-Chung Lee, and Sheng-Hui Chen

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Abstract

Three-dimensional plasmon resonance device has been fabricated by using auto-cloning technique and atomic layer deposition methods. The device is based on a metal-insulator-metal rectenna circuit. The power conversion efficiencies of the device were about 1.3×10−3.

© 2016 Optical Society of America

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