Abstract
We show a sputter system with an innovative combination of components which enables low cost of ownership, high volume and high yield production of demanding optical interference filters on thin glass wafers.
© 2016 Optical Society of America
PDF ArticleMore Like This
M. Chesaux, S. Schwyn Thöny, S. Gees, and A. Frigg
WA.2 Optical Interference Coatings (OIC) 2016
Ralph Faber and Richard Meagher
WB.6 Optical Interference Coatings (OIC) 2019
David A. Glocker and John Lanzafame
WE.5 Optical Interference Coatings (OIC) 2016