Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
Conferences > OIC > 2016 > WA > WA.6

Durable AlN and Al2O3 Optical Films Deposited by Low Duty Cycle Pulsed Magnetron Sputtering

J. Kohout, T. Schmitt, R. Vernhes, O. Zabeida, J.E. Klemberg-Sapieha, and L. Martinu

Not Accessible

Your library or personal account may give you access

Abstract

We applied low-duty cycle pulsed magnetron reactive sputtering of an Al target to achieve stable deposition of transparent Al2O3 films and AlN films with high density, high hardness, and low stress at deposition rates of ~60 nm/min.

© 2016 Optical Society of America

PDF Article
More Like This
Optical, Structural and Mechanical Properties of Silicon-Oxynitride Films Prepared by Pulsed Magnetron Sputtering

Chien-Jen Tang, Cheng-Chung Jaing, Chuen-Lin Tien, Wei-Chiang Sun, and Shih-Chin Lin
ThD.4 Optical Interference Coatings (OIC) 2016

Characterization of WO3-Nb2O5 composite films prepared by bipolar pulsed dual magnetron sputtering

Chien-Jen Tang, Ching-Hung Chou, Yong-Wei Hsu, and Cheng-Chung Jaing
WA.8 Optical Interference Coatings (OIC) 2013

Low Residual Stress in Si3N4/SiO2 Multilayer Coatings by Reactive Pulsed Magnetron Sputtering Technique

Chuen-Lin Tien, Po-Chih Chen, Kuei-Luen Chen, Chien-Jen Tang, Sheng-Hua Lu, and Shih-Chin Lin
ThD.12 Optical Interference Coatings (OIC) 2016

View More...
Select as filters
Select Topics Cancel
Top
       
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.
Privacy | Terms of Use