Approaches to an Adaptive Ion-Beam Sputtering Process

F. Carstens; H. Ehlers; D. Ristau

doi:10.1364/OIC.2016.WA.4

Optical Interference Coatings 2016
OSA Technical Digest (online) (Optica Publishing Group, 2016),
paper WA.4
•https://doi.org/10.1364/OIC.2016.WA.4

Approaches to an Adaptive Ion-Beam Sputtering Process

F. Carstens, H. Ehlers, and D. Ristau

Optical Interference Coatings 2016

Tucson, Arizona United States
19–24 June 2016
ISBN: 978-1-943580-13-2

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Deposition I - Sputtering and IAD (WA)

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F. Carstens, H. Ehlers, and D. Ristau, "Approaches to an Adaptive Ion-Beam Sputtering Process," in Optical Interference Coatings 2016, OSA Technical Digest (online) (Optica Publishing Group, 2016), paper WA.4.

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Abstract

To increase the reproducibility of IBS coatings, the development of a model-based, closed-loop process-control scheme was started. Preliminary work for building up a process-database combining several in- and ex-situ measurement methods was performed.

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