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Conferences > OIC > 2016 > ThD > ThD.5

Internal structure and mechanical characteristics of TiO2 optical thin films

Taketomo Shiina, Mamoru Hao, Hiroshi Murotani, Tsutomu Katsumata, and Toshihiro Housen

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Abstract

We investigated the relationship between internal structure and mechanical characteristics of TiO2 optical thin films. The crystal structure and the hardness of the films influence the adhesion of the films.

© 2016 Optical Society of America

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