Thermo optic properties of a-Si film: ellipsometry measurements

Penghui Ma

doi:10.1364/OIC.2016.ThC.6

Optical Interference Coatings 2016
OSA Technical Digest (online) (Optica Publishing Group, 2016),
paper ThC.6
•https://doi.org/10.1364/OIC.2016.ThC.6

Thermo optic properties of a-Si film: ellipsometry measurements

Penghui Ma

Optical Interference Coatings 2016

Tucson, Arizona United States
19–24 June 2016
ISBN: 978-1-943580-13-2

From the session
Characterization and Optical Properties (ThC)

Not Accessible

Your library or personal account may give you access

Get PDF
Email
Share
Get Citation
Copy Citation Text
P. Ma, "Thermo optic properties of a-Si film: ellipsometry measurements," in Optical Interference Coatings 2016, OSA Technical Digest (online) (Optica Publishing Group, 2016), paper ThC.6.

Export Citation
- BibTex
- Endnote (RIS)
- HTML
- Plain Text
Citation alert
Save article

Abstract

Amorphous silicon film was deposited with magnetron sputtering on fused silica substrate. The thin film was measured with an ellipsometer equipped with cryostat. The refractive indices and thermo-optic coefficient were extracted.

PDF Article

More Like This

Tailoring the Optical Properties of Boron Doped μc-Si:H Thin Films by Changing the SiH4/H2 Ratio Using RF-PECVD Process

Ghada Dushaq, Ammar Nayfeh, and Mahmoud Rasras
FTu3F.2 Frontiers in Optics (FiO) 2016

Thickness dependent optical properties of MoS2 thin films probed by spectroscopic ellipsometry

Gobinda Pradhan, Rahul Kesarwani, Alika Khare, and Ashwini Kumar Sharma
P1A.14 International Conference on Fibre Optics and Photonics (Photonics) 2016

Optical, Structural and Mechanical Properties of Silicon-Oxynitride Films Prepared by Pulsed Magnetron Sputtering

Chien-Jen Tang, Cheng-Chung Jaing, Chuen-Lin Tien, Wei-Chiang Sun, and Shih-Chin Lin
ThD.4 Optical Interference Coatings (OIC) 2016

Previous Article Next Article