Film thickness measurements around curved surfaces using a microscope-based reflectometer

Christine Cecala; Lirong Pei; Arnette Brooks; Dave Brockway; Evan Bittner; Karl W. Koch

doi:10.1364/OIC.2016.ThB.6

Optical Interference Coatings 2016
OSA Technical Digest (online) (Optica Publishing Group, 2016),
paper ThB.6
•https://doi.org/10.1364/OIC.2016.ThB.6

Film thickness measurements around curved surfaces using a microscope-based reflectometer

Christine Cecala, Lirong Pei, Arnette Brooks, Dave Brockway, Evan Bittner, and Karl W. Koch

Optical Interference Coatings 2016

Tucson, Arizona United States
19–24 June 2016
ISBN: 978-1-943580-13-2

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OIC 2016 Measurement Problem Results and Characterization (ThB)

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C. Cecala, L. Pei, A. Brooks, D. Brockway, E. Bittner, and K. W. Koch, "Film thickness measurements around curved surfaces using a microscope-based reflectometer," in Optical Interference Coatings 2016, OSA Technical Digest (online) (Optica Publishing Group, 2016), paper ThB.6.

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Abstract

A commercial microscope-based reflectometer was modified and a custom measurement protocol and analysis regimen were developed for characterization of coatings around curved surfaces.

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