Instantaneous One-Angle White-Light Scatterometer

Claude Amra; Myriam Zerrad; Michel Lequime; Simona Luikaityte

doi:10.1364/OIC.2016.ThB.11

Optical Interference Coatings 2016
OSA Technical Digest (online) (Optica Publishing Group, 2016),
paper ThB.11
•https://doi.org/10.1364/OIC.2016.ThB.11

Instantaneous One-Angle White-Light Scatterometer

Claude Amra, Myriam Zerrad, Michel Lequime, and Simona Luikaityte

Optical Interference Coatings 2016

Tucson, Arizona United States
19–24 June 2016
ISBN: 978-1-943580-13-2

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OIC 2016 Measurement Problem Results and Characterization (ThB)

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C. Amra, M. Zerrad, M. Lequime, and S. Luikaityte, "Instantaneous One-Angle White-Light Scatterometer," in Optical Interference Coatings 2016, OSA Technical Digest (online) (Optica Publishing Group, 2016), paper ThB.11.

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Abstract

We present a white light scatterometer operating at a unique scattering direction. Mechanical motions and wavelength scans are removed. The technique provides an immediate flexible characterization of roughness with no loss of resolution.

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