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Al-doped ZnO amorphous films as conductive layers in ultra-low absorptive optical coatings

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Abstract

Amorphous Al-doped ZnO films useable for charge control on interference mirrors in precision interferometry are described. Absorption of several ppm and Rsh in the GΩ/sq range were obtained in ≤ 500 nm thick films.

© 2016 Optical Society of America

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