Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Characterization of Grain Sizes of HfO2 Single Layers

Not Accessible

Your library or personal account may give you access

Abstract

The grain sizes in HfO2 single layers were characterized using the atomic force microscope, power spectral density statistical models and X-ray diffraction technique. The grain sizes determined by these methods were about 10 nm similarly.

© 2016 Optical Society of America

PDF Article
More Like This
Optical Properties of HfO2 Thin Films Grown by Atomic Layer Deposition

Ramutis Drazdys, Laurynas Stasiūnas, Konstantinas Leinartas, Rytis Buzelis, Tomas Tolenis, Kęstutis Juškevičius, Ugnius Gimževskis, Algirdas Selskis, and Vitalija Jasulaitienė
WB.2 Optical Interference Coatings (OIC) 2016

SiO2 and HfO2 e-beam single layers optical properties variations with hygrometry

A. Soutenain, M. Chorel, E. Lavastre, M. Mireles, S. Macnally, A. Rigatti, C. Ducros, and C. Dublanche-Tixier
OTh1B.5 Optical Fabrication and Testing (OF&T) 2023

Damage Performance of Ion Beam Sputtered Sc2O3 and HfO2 Single Layers Tested in Air and Ultra-high Vacuum

P. F. Langston, D. Patel, B. A. Reagan, F. J. Furch, A. H. Curtis, J.J. Rocca, and C.S. Menoni
JTu3O.5 CLEO: Applications and Technology (CLEO:A&T) 2017

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved