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Conferences > OIC > 2013 > WB > WB.3

Correlated Choice of Design and Monitoring Strategy

A. Tikhonravov, M. Trubetskov, I. Kozlov, S. Alekseev, P. Konotopov, and V. Zhupanov

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Abstract

Previously elaborated indirect monitoring strategy is modified in order to raise an accuracy of layer thickness monitoring. This strategy is applied for deposition of a specially chosen hot mirror design with no thin layers.

© 2013 Optical Society of America

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