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Conferences > OIC > 2013 > ThC > ThC.4

Ellipsometric Data Selection for More Accurate Optical Characterization of Thin Film Material

Suyong Wu, Yun Huang, Kaiyong Yang, Zhongqi Tan, Tianliang Qu, and Xingwu Long

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Abstract

A novel strategy of choosing ellipsometric data is presented for more accurate optical characterization of thin film materials based on partial derivatives analysis and selection.

© 2013 Optical Society of America

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