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Conferences > OIC > 2013 > ThB > ThB.7

Reactive Magnetron Sputter Technologies for Precision Optical Coatings

Peter Frach, Hagen Bartzsch, Daniel Gloess, Kerstin Taeschner, and Joern-Steffen Liebig

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Abstract

Highly productive technologies for precison optics will be presented. Film properties of multi-layer and gradient coatings as well as results regarding reproducibility, climatic stability and LIDT will be shown.

© 2013 Optical Society of America

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