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Conferences > OIC > 2013 > ThA > ThA.4

Hybrid Organic-Inorganic Optical Films Deposited by Ion Beam Assisted CVD

Oleg Zabeida, Richard Vernhes, Thomas Poirié, Sebastien Chiarotto, Karin Scherer, Thomas Schmitt, Viktor Marushka, Jolanta E. Klemberg-Sapieha, and Ludvik Martinu

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Abstract

Hybrid SiOCH films were deposited in a standard box coater fitted with a broad beam ion source. The effect of process parameters on the deposition rate, the optical and mechanical properties and environmental stability of the deposited films were investigated.

© 2013 Optical Society of America

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