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Conferences > OIC > 2013 > TA > TA.4

Complex optical and structural characterization of nano-sculptured Ta2O5 columnar films

Tomas Tolenis, Egidijus Pupka, Gintarė Batavičiūtė, Ramutis Drazdys, Algirdas Selskis, and Andrius Melninkaitis

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Abstract

Columnar microstructures were deposited with Ta2O5 material. Optical investigation showed most anisotropic sample to be formed at 60° angle. Laser induced damage were also measured for the samples deposited at 0° and 60° angles.

© 2013 Optical Society of America

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