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Conferences > OIC > 2013 > FA > FA.6

Reliable Characterization of e-beam Evaporated TiO2 Films

T. V. Amochkina, M. K. Trubetskov, A. V. Tikhonravov, I. B. Angelov, and V. Pervak

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Abstract

We study TiO2 films deposited at different substrate temperatures. The films are carefully characterized on the basis of in situ and ex situ measurements. The results will be useful for further laser-induced damage threshold investigations.

© 2013 Optical Society of America

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