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Ion Assisted Deposition of Conformal Coatings for the Manufacture of Large Area Wire Grid Polarizers

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Abstract

Ion-assisted evaporation is used to dielectric coat gratings in a process scalable to manufacturing on meter-scale substrates. Conformal coating is the critical step in Self-Aligned Double Patterning- used to extend the resolution of optical lithography.

© 2010 Optical Society of America

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