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Conferences > OIC > 2010 > WB > WB6

Densification of Plasma Polymerized TiOxCyNz Films with Air Exposure

Lirong Sun, Hao Jiang, John T. Grant, Timothy J. Bunning, and Rachel Jakubiak

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Abstract

TiOxCyNz thin films, plasma-polymerized at room temperature, experienced a significant decrease in film thickness and increase in refractive index with time during air exposure. Correlation of optical and structural changes provided insight into densification mechanisms.

© 2010 Optical Society of America

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