Precision Filter Manufacture Using Direct Optical Monitoring

Alfons Zöller; Jonathan Williams; Sigrid Hartlaub

doi:10.1364/OIC.2010.TuC8

Optical Interference Coatings
OSA Technical Digest (Optica Publishing Group, 2010),
paper TuC8
•https://doi.org/10.1364/OIC.2010.TuC8

Precision Filter Manufacture Using Direct Optical Monitoring

Alfons Zöller, Jonathan Williams, and Sigrid Hartlaub

Optical Interference Coatings 2010

Tucson, Arizona United States
6–11 June 2010
ISBN: 978-1-55752-891-9

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Optical Monitoring (TuC)

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A. Zöller, J. Williams, and S. Hartlaub, "Precision Filter Manufacture Using Direct Optical Monitoring," in Optical Interference Coatings, OSA Technical Digest (Optica Publishing Group, 2010), paper TuC8.

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Abstract

The performance of a box coater with double rotating substrate holders in combination with direct optical monitoring was investigated. The reproducibility and uniformity results of a multilayer system with tight specifications will be presented.

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