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Conferences > OIC > 2010 > TuC > TuC4

Dielectric Filter Production with in-situ Broadband Optical Monitoring

Othmar Zueger

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Abstract

An in-situ broadband optical monitoring is used in a magnetron sputtering system for dielectric filter manufacturing. The spectrometer is synchronized with the substrates motion and measures the reflection of the coating during the deposition process.

© 2010 Optical Society of America

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