Advantages of Radio Frequency Plasma Enhanced Evaporation Compared To Other Coating Techniques

Walter Schwärzler; Rainer Marx; Dietmar Noack; David Gary

doi:10.1364/OIC.2007.TuEPDP3

Optical Interference Coatings
OSA Technical Digest (CD) (Optica Publishing Group, 2007),
paper TuEPDP3
•https://doi.org/10.1364/OIC.2007.TuEPDP3

Advantages of Radio Frequency Plasma Enhanced Evaporation Compared To Other Coating Techniques

Walter Schwärzler, Rainer Marx, Dietmar Noack, and David Gary

Optical Interference Coatings 2007

Tucson, Arizona United States
3–8 June 2007
ISBN: 1-55752-841-1

From the session
Postdeadline Session (TuE)

Not Accessible

Your library or personal account may give you access

Get PDF
Email
Share
Get Citation
Copy Citation Text
W. Schwärzler, R. Marx, D. Noack, and D. Gary, "Advantages of Radio Frequency Plasma Enhanced Evaporation Compared To Other Coating Techniques," in Optical Interference Coatings, OSA Technical Digest (CD) (Optica Publishing Group, 2007), paper TuEPDP3.

Export Citation
- BibTex
- Endnote (RIS)
- HTML
- Plain Text
Citation alert
Save article

Abstract

A comparison of Radio Frequency Plasma Enhanced-Electron Beam Evaporation versus other advanced coating techniques for densified oxide layers, advantages include; absorption & shift free layers, reduced maintenance costs, cleaning & downtime, filament-less, high long-term stability, and use of pure reactive gas expands new areas of applications.

PDF Article

More Like This

Plasma sources for precision optical coatings

H. Hagedorn, R. Beckmann, R. Götzelmann, H. Reus, and A. Zöller
MB3 Optical Interference Coatings (OIC) 2007

Adhesion enhancement by surface pretreatment with argon-helium plasma for antireflection coating on TAC

Shuan-Wen Wang, Chien-Jen Tang, and Cheng-Chung Lee
ThD6 Optical Interference Coatings (OIC) 2007

Temperature stability of optical coatings produced by plasma and ion assisted evaporation processes

A. Zöller
MA.1 Optical Interference Coatings (OIC) 1998

Previous Article Next Article