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Conferences > OIC > 2007 > TuD > TuD9

Preparation and characterization of free-standing Zr filter for soft X-ray laser application

Li Zhang, Yonggang Wu, Hong Cao, Xiuping Zheng, Hongfei Jiao, and Lingyan Chen

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Abstract

200μg/cm2 free-standing Zr filters of 20mm in diameter were prepared with DC magnetron sputtering. The characteristics of the filters such as soft X-ray spectral transmittance, visible light blocking performance and impurities in Zr filters were measured. Results show that the transmittance is 19% at 13.9nm and the visible light blocking is -43dB. Carbon, Oxygen and Nitrogen are the major impurities that affect transmittance in the soft X-ray region.

© 2007 Optical Society of America

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