Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
Conferences > OIC > 2007 > TuB > TuB3

Residual stress of rugate filter made with Ta2O5-SiO2 composite thin films by RF ion-beam sputtering

Chien-Jen Tang, Cheng-Chung Jaing, Kuan-Shiang Lee, Wei-Ting Shen, and Cheng-Chung Lee

Not Accessible

Your library or personal account may give you access

Abstract

Rugate filters made by composite film of Ta-Si oxide have been realized by using RF ion-beam sputtering. The residual stress and deflection of different refractive-indices of stepwise film stacks and rugate filter have been studied.

© 2007 Optical Society of America

PDF Article
More Like This
Rugate filter made with composite thin film by ion beam sputtering

Cheng -Chung Lee, Chien-Jen Tang, Jin-Cherng Hsu, and Jean-Yee Wu
ThD10 Optical Interference Coatings (OIC) 2004

Effect of Thermal Annealing on the Residual Stress of Graded-index-like Films Deposited by RF Ion-Beam Sputtering

Chien-Jen Tang, Cheng-Chung Jaing, Kun-Hsien Lee, and Cheng-Chung Lee
WD8 Optical Interference Coatings (OIC) 2010

Optical Properties of TiO2 – SiO2 Mixture Thin Films Produced by Ion-Beam Sputtering

T.V. Amotchkina, D. Ristau, M. Lappschies, M. Jupé, A.V. Tikhonravov, and M.K. Trubetskov
TuA8 Optical Interference Coatings (OIC) 2007

View More...
Select as filters
Select Topics Cancel
Top
       
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.
Privacy | Terms of Use