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Conferences > OIC > 2004 > WA > WA4

Design and fabrication of infrared anti-reflective Germanium gratings

JJ. Simon, L. Escoubas, M. Lo Monaco, R Willey, Z. Elalamy, S. Enoch, and H. Giovannini

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Abstract

A germanium grating, working in the infrared at high angles of incidence, has been designed and fabricated using wet anisotropic etching. The reflectance properties are calculated using a modal method and compared with experimental results.

© 2004 Optical Society of America

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