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Conferences > OIC > 2004 > TuE > TuE7

On-line control of the deposition of optical coatings by magnetron sputtering

Matthias List, Christian Melde, Christoph Köckert, and Claus Illgen

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Abstract

Reactive sputtering processes become more relevant for the deposition of complex optical coatings. Using an in situ transmittance measurement the thickness growing of low (SiO2) and high (Nb2O5) index layers can be measured and controlled.

© 2004 Optical Society of America

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