Interferential MEMS Optical Switch (IMOS)

Hiroichi Ishikawa

doi:10.1364/OIC.2001.WE2

Optical Interference Coatings
OSA Technical Digest Series (Optica Publishing Group, 2001),
paper WE2
•https://doi.org/10.1364/OIC.2001.WE2

Interferential MEMS Optical Switch (IMOS)

Hiroichi Ishikawa

Optical Interference Coatings 2001

Banff Canada
ISBN: 1-55752-682-6

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MEMS/Micro-optical Devices (WE)

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H. Ishikawa, "Interferential MEMS Optical Switch (IMOS)," in Optical Interference Coatings, OSA Technical Digest Series (Optica Publishing Group, 2001), paper WE2.

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Abstract

The structure of substrate/absorbing layer/air gap/transparent layer can realize an optical switch. The gap is fabricated and controlled by MEMS. The optical properties of the materials are described in the paper.

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