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Hollow Optical Waveguide with Thin Film Coating for Micromachined Photonic Integrated Circuits

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Abstract

We propose a novel hollow optical waveguide with thin film coating for temperature insensitive photonic devices. Low-loss and polarization insensitive propagation characteristics are predicted. We fabricated a hollow waveguide with metal coated walls on GaAs substrate. The propagation loss was 2.6 dB/cm and 7.3 dB/cm for TE and TM modes, respectively.

© 2001 Optical Society of America

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