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Conferences > OIC > 2001 > ThB > ThB4

Optical coatings for VUV applications

J. Ullmann, C. Zaczek, A. Pazidis, J. Lüdecke, B. von Blanckenhagen, and D. Tonova

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Abstract

Depending on the type of optical designs for future lithography systems, different types of optical coatings are required. Beside lithography, antireflective and highly reflective interference coatings are needed for a wide range of applications using F2-light.

© 2001 Optical Society of America

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