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Conferences > OIC > 2001 > ThA > ThA2

Roughness and scattering of coatings for DUV to EUV spectral regions

Angela Duparré

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Abstract

This paper presents a survey of our recent developments of experimental and modeling techniques for thin films and substrates. Investigations into roughness and scattering properties of components for the deep to extreme UV are described.

© 2001 Optical Society of America

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