Plasma spectra analysis using bidimensional acquisition with fiber optics

E. Perez-Tijerina; R. Machorro

doi:10.1364/OIC.2001.ME5

Optical Interference Coatings
OSA Technical Digest Series (Optica Publishing Group, 2001),
paper ME5
•https://doi.org/10.1364/OIC.2001.ME5

Plasma spectra analysis using bidimensional acquisition with fiber optics

E. Perez-Tijerina and R. Machorro

Optical Interference Coatings 2001

Banff Canada
ISBN: 1-55752-682-6

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Monitoring and Process Control (ME)

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E. Perez-Tijerina and R. Machorro, "Plasma spectra analysis using bidimensional acquisition with fiber optics," in Optical Interference Coatings, OSA Technical Digest Series (Optica Publishing Group, 2001), paper ME5.

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Abstract

Two plasma assisted deposition techniques are analyzed with its multichannel spectra, using a optical fiber array, a spectrograph and a ICCD. The plasma electron density and temperature are estimated assuming statistical equilibrium, relating the spectral line intensity ratio with N and T.

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