Abstract
Ion beam sputtering and broadband optical monitoring is a powerful combination for the deposition of precision optical interference coatings like chirped mirrors or edge filters. The influence of transmission measurement errors on the resulting deposition accuracy is investigated.
© 2001 Optical Society of America
PDF ArticleMore Like This
Bruno Badoil, Fabien Lemarchand, Michel Cathelinaud, and Michel Lequime
WC5 Optical Interference Coatings (OIC) 2007
A. V. Tikhonravov, M. K. Trubetskov, M. A. Kokarev, T. V. Amotchkina, A. Duparré, E. Quesnel, D. Ristau, and S. Günster
TuD2 Optical Interference Coatings (OIC) 2001
Alexander V. Tikhonravov, Michael K. Trubetskov, and Tatiana V. Amotchkina
TuC3 Optical Interference Coatings (OIC) 2010