Ion-assisted deposition of moisture stable HfO2 thin-films

Dale E. Morton; Traci R. Jensen

doi:10.1364/OIC.2001.MB6

Optical Interference Coatings
OSA Technical Digest Series (Optica Publishing Group, 2001),
paper MB6
•https://doi.org/10.1364/OIC.2001.MB6

Ion-assisted deposition of moisture stable HfO₂ thin-films

Dale E. Morton and Traci R. Jensen

Optical Interference Coatings 2001

Banff Canada
ISBN: 1-55752-682-6

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Deposition of Optical Coatings II (MB)

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D. E. Morton and T. R. Jensen, "Ion-assisted deposition of moisture stable HfO2 thin-films," in Optical Interference Coatings, OSA Technical Digest Series (Optica Publishing Group, 2001), paper MB6.

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Abstract

This paper reports the process parameters used to make moisture stable HfO₂, the optical properties of HfO₂ in the UV-visible spectral region and gives an example of a moisture stable thin-film coating of a HfO₂/SiO₂ LWP filter.

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