Phase Retrieval for Optical Metrology: Past, Present and Future

James R. Fienup

doi:10.1364/OFT.2017.OW2B.1

Optical Design and Fabrication 2017 (Freeform, IODC, OFT)
OSA Technical Digest (online) (Optica Publishing Group, 2017),
paper OW2B.1
•https://doi.org/10.1364/OFT.2017.OW2B.1

Phase Retrieval for Optical Metrology: Past, Present and Future

James R. Fienup

Optical Fabrication and Testing 2017

Denver, Colorado United States
9–13 July 2017
ISBN: 978-1-943580-31-6

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Optical Characterization and Simulation (OW2B)

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J. R. Fienup, "Phase Retrieval for Optical Metrology: Past, Present and Future," in Optical Design and Fabrication 2017 (Freeform, IODC, OFT), OSA Technical Digest (online) (Optica Publishing Group, 2017), paper OW2B.1.

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Abstract

Phase retrieval allows for inexpensive, vibration-tolerant, non-interferometric, optical metrology of systems and surfaces. Made accurate and robust by the use of a diversity of measurements, it is currently under development for freeform optical surfaces.

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