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Conferences > OFT > 2017 > OM3B > OM3B.6

Low-coherence Interferometer Measuring Absolute Thickness and Topography with High Accuracy

Yang Zhao, Greg Schmidt, Jonathan D. Ellis, and Duncan T. Moore

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Abstract

An interferometer was developed to measure the absolute thickness map of plane-parallel optical samples up to 50 mm diameter, with 30 nm repeatability, and <100 nm accuracy. The surface topography of the sample was also measured and compared to be consistent with a Zygo white light interferometer.

© 2017 Optical Society of America

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