Abstract

The demand for large scale optics is increasing. The need has been driven by major science programmes, next generation lithography systems, space based earth orbiters and solar energy generating systems. A previous low requirement for precision optics of over 350mm size meant their effective mass production was neither emphasized nor established, consequently prices remained unduly high. This paper introduces some UK developments in support of establishing an effective production line for fabricating optics in the metre scale range. A target production brief was to produce 1 metre sized optics of 10nm RMS form accuracy with 3 discrete process stages each taking less than 10 hours. This paper reports progress against this goal.

© 2012 Optical Society of America